1、参考SEMI标准
E4-0699 SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
E5-0600 SEMI Equipment Communications Standard 2 Message Content (SECS-II)
E37-95 High-Speed SECS Message Services (HSMS) Generic Services
E37.1-96 High Speed Message Services HSMS-SS)
E30-0200A Generic Model for Communications and Control of Manufacturing Equipment (GEM)
2、设置通信参数
设置设备的连线模式、时间、端口、IP、初始状态、在线状态、离线状态、Function模式、通讯格式化等初始工作
3、连接模式(借别人图)
4、控制状态模式(借别人图)
5、设备状态(借别人图)