服务器系统检测,检查系统,管理服务器,检查装置及检查数据管理方法 Check the system management server, check the device and inspection...

摘要：

提供一种检查系统,管理服务器,检查装置及检查数据管理方法,该检查系统能够有效地管理从多个装置得到的数据. Provide an inspection system, server management, data management inspection apparatus and inspection method, the inspection system to efficiently manage data from multiple devices to get. 检查系统(10)具有:检查装置(11a,11b,11c),用于检查在工厂中生产的产品;管理服务器(30),其经由通信线路与检查装置(11a,11b,11c)相连接. Inspection system (10) comprises: checking means (11a, 11b, 11c), for checking the products in factories; management server (30), which are connected via a communication line inspection means (11a, 11b, 11c). 检查装置(11a)具有装置一侧检查结果数据库(14a). Checking means (11a) having a side inspection result database means (14a). 装置一侧检查结果数据库(14a)用于存储表示由检查装置(11a)对基板进行检查的结果的数据即检查结果数据. Data device side inspection result database (14a) for storing information representing the results of the inspection device (11a) of the substrate inspection, that inspection result data. 装置一侧检查结果数据库(14a)是由键和值构成的键-值式数据库. Device side test results database (14a) is a bond formed by the keys and values - values database.

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