离子注入的matlab程序,等离子体离子注入pic仿真的matlab实现picnumericalsimulation.pdf...

等离子体离子注入pic仿真的matlab实现picnumericalsimulation

等离子体离子注入PIC 仿真的MATLAB 实现

*

裴宪军, 巩春志, 汪志健, 田修波, 杨士勤

( 哈尔滨工业大学 先进焊接与连接国家重点实验实 哈尔滨 150001)

PIC Numerical Simulation of Plasma Ion Implantation

Based on MATLAB

*

Pei Xianjun, Gong Chunzhi, Wang Zhijian, Tian Xiubo , Yang Shiqin

State key lab of advanced welding & joining, Harbin Institute of Technology, Harbin ，150001

Abstract MATLAB is a high-level technical computing language, and its add-on toolbox extends the MATLAB

environment to solve particular problems in a convenient way. In this article, Partial Differential Equation (PDE)

toolbox and interpolation functions are used to conduct Particle-In-Cell simulation of plasma ion implantation of

square tube. A comparison between MATLAB method and traditional method has been made to verify the

accuracy of our numerical calculation. The influence of inner electrode size on average implantation energy has

been investigated in the article. The inner electrode has a “clamp” effect on electrical field in tube. The larger

electrode may lead to higher average implantation energy. The initial sheath configuration a heart-shaped or

dovetail-shaped object has also been simulated conveniently using MATLAB method. The MATLAB provides us

an easy and useful tool to conduct PIC simulation of plasma ion implantation.

Key words: MATLAB, Plasma ion implantation, square tube

摘要 MATLAB 是当今先进计算软件之一，它提供的各类工具箱和内置函数给应用者带来了极大的方

便。本文通过调用 MATLAB 中偏微分方程工具箱和插值函数实现了方管内表面等离子体离子注入的

Particle-In-Cell 模拟，并与传统其他语言程序的计算结果对比，结果基本一致。文章还讨论了不同尺寸的内

电极对离子平均注入能量的影响，结果表明：即使有内部电极“钳位”，平均注入能量也不高；在管壁偏压

相同的情况下，尺寸较大的内电极因为“钳位”效果较好而具有较高的平均离子注入能量。最后提供了

MATLAB 对不规则形状靶件的计算结果，证明了M