离子注入的matlab程序,等离子体离子注入PIC仿真的MATLAB实现

等离子体离子注入 PIC 仿真的 MATLAB 实现 裴宪军 　巩春志 　汪志健 　田修波3　杨士勤(哈尔滨工业大学先进焊接与连接国家重点实验室 　哈尔滨 　150001)Particlein2Cell Simulation of Plasma Ion Implantation Based on Software Package MATLAB Pei Xianjun ,Gong Chunzhi ,Wang Zhijian ,Tian Xiubo3,Yang Shiqin( State Key Lab of Advanced Welding &Joining , Harbin Institute of Technology , Harbin 150001, China)　　 Abstract 　The plasma ion implantation for irregular2shaped objects was simulated in particlein2cell (PIC) modewith the software package MATLAB. The interpolation functions and Partial Differential Equation (PDE) toolbox of MATLAB were used to realize the PIC simulation of plasma ion implantation inside a square tube. The impact of the inner2electrode ’ s size on the average implantation energy was evaluated. The“clamp”effect of the inner wall strongly influences the field distribution inside the tube ;and a larger area leads to a higher average implantationenergy. The simulated results show that biased at a fixed voltage ,the strong“clamping”of the electrode with large surface area results in a fairly high average implantation2energy. The simulated results with MATLAB agree well with those calculated in other conventional methods.Besides ,the initial sheath configurations on a rod with heartshaped crosssection or inside a dovetail slot were also simulated. 　　Keywords 　MATLAB ,Plasma ion implantation ,Square tube ,Particlein2Cell ,Numerical simulation 　　摘要 　MATLAB 是当今先进计算软件之一 ,它提供的各类工具箱和内置函数给应用者带来了极大的方便。本文通过调用 MATLAB 中偏微分方程工具箱和插值函数实现了方管内表面等离子