SPIE投稿格式

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Manuscripts should be a minimum of 6 (six) single-sided pages (maximum of 20 pages). Length requirements may vary by meeting, so please see the Author/Presenter Information page for your specific conference.

Manuscripts containing color and submitted through the SPIE Submission System (sign in at SPIE.org/myaccount) will retain color in all of SPIE's digital publications at no charge.


Manuscripts need to be submitted in one of the following formats:
.doc (MSWord)
.docx (MSWord 2007)
.rtf (rich text)
.ps (PostScript)
.prn (PCL)
.pdf
If you are using another software to create your manuscript, you can then convert your file to a print format by selecting the "print - to file" option with a .prn or .ps file type.
All text, including footnotes and author information, and illustrations must appear within a 6.75x8.75 in. (17.15 x 22.23 cm) area.
If you use a U.S.-standard page (8.5 x 11 in./21.59 x 27.94 cm), set margins to .875 in. (2.22 cm) left and right, 1.0 in. (2.54 cm) top and 1.25 in. (3.17 cm) bottom.
If you use an A4 page, set margins to 1.925 cm left and right, 2.54 cm top, and 4.94 cm bottom.
Use Times Roman or equivalent font for all text. Use boldface or italic for emphasis only. Single-space all text in one column, allowing extra space between paragraphs.
Font Sizes

The proper fonts (all Times Roman) for various elements are:

1. Article title is 16 pt bold

2. Author names, affiliations are 12 pt

3. SECTION HEADING are 11 pt bold caps

4. Subsection heading are 10 pt bold

5. Body text is 10 pt

6. Figure captions are 9 pt

7. Footnote text is 9 pt


Title


Center the paper title at the top of the page in 16-point bold type. Only the first word, proper nouns, and acronyms are capitalized. Keep titles brief and descriptive. Avoid starting with articles or prepositions, e.g., "The study of … ," "On the …." Spell out acronyms unless they are widely known.


Authors and affiliations

Use 12-point type, centered. Leave extra space between authors and affiliations/address. Omit titles or degrees such as Dr., Prof., Ph.D., etc. Avoid acronyms that are not internationally known.


Abstract

Begin the abstract two lines below author affiliation(s). Type "ABSTRACT" on a line by itself, all capitals, centered, 11-point type and boldfaced. Limit abstract to 250 words.


Keyword list


To ensure that your paper is indexed appropriately, please insert a list of up to 10 keywords of your choice between the abstract and the body of the text.


Principal headings


Type on a separate line, 11-point type, centered, all capital letters, and boldfaced. Number sections sequentially (i.e., 1, 2, 3,...).


Subheadings

Type on a separate line flush with the left margin. Capitalize the first letter of the first word and proper names only, and boldface the heading. Number subsections according to the following example: Sec. 3.1 is the first subsection of Sec. 3; Sec. 3.2.1 is a subsection of Sec. 3.2.


Paragraphs

Leave additional space between paragraphs. Indentation is optional.


Text

All body text, including abstract, should be 10-point type.


Acronyms

For the first occurrence (other than for commonly used acronyms such as IR, CCD, MTF, etc.), spell out each word followed by the acronym in parentheses, e.g., liquid phase epitaxy (LPE) or Extreme Ultraviolet Explorer (EUVE).


Equations

Type all equations. Punctuate as a sentence. Type display equation numbers in Arabic numerals in parentheses flush with the right margin. Number display equations consecutively.


Figures and tables

Figures and tables should be clear and legible but sized to make economical use of space, and must fit entirely within the manuscript image area. Similar or related figures should be of uniform size with uniform lettering. All figures should be called out in the text as well as properly labeled and captioned. Number figures sequentially using Arabic numerals, and place a numbered caption near each figure or table. Figures may be positioned within the text or at the end of the manuscript.


Figure and table captions

Type captions in 9-point type. Number figures sequentially, and begin caption with figure or table number.


Footnotes


Additional author information, such as email addresses and web site location should be given in a footnote. Footnotes must appear within the page image area.


Reference citations


Type reference citations within the text as superscripts.

Acknowledgments

All acknowledgments for technical and financial support and government contract or copyright information should go in this section, which follows the text but precedes the references.

References

SPIE is able to display the references section of your paper in the SPIE Digital Library, complete with links to referenced journal articles, proceedings papers, and books, when available. This added feature will bring more readers to your paper and improve the usefulness of the SPIE Digital Library for all researchers.

Denote reference citations within the text of your paper by means of a superscript number. List references at the end of the paper in numerical order, and enclose the reference number in square brackets. Include the following information (as applicable).


For a book: authors (last name first, then initials), [book title], publisher, city, page or chapter numbers (year).
[1] Booth, N. and Smith, A. S., [Infrared Detectors], Goodwin House Publishers, New York & Boston, 241-248 (1997).

For a journal paper: authors (last name first, then initials), "paper title" (in quotes), journal abbreviation, volume number(issue), page numbers (year).

[2] Davis, A. R., Bush, C., Harvey, J. C. and Foley, M. F., "Fresnel lenses in rear projection displays," SID Int. Symp. Digest Tech. Papers 32(1), 934-937 (2001).
For a proceedings paper: authors (last name first, then initials), "paper title" (in quotes), proceedings volume name and/or number, page numbers or CID (year).

[3] Van Derlofske, J. F., "Computer modeling of LED light pipe systems for uniform display illumination," Proc. SPIE 4445, 119-129 (2001).

[4] Seo, G., Ok, J., Lee, C., "Fast implementation for neural network classification," Proc. SPIE 8871, 887107 (2013).
《Levinson H J. Overlay/Principles of Lithography, SPIE, 2005》是一本关于光刻中overlay(叠加)原理的著作。光刻是一种关键的半导体制造技术,用于制造微芯片中的各种复杂结构。而overlay技术在光刻中起着至关重要的作用。 Overlay在光刻中指的是将不同层次的芯片结构精确地叠加在一起,使得各个层次之间的结构对位精度达到亚微米级。这涉及到光刻机的对位技术,以及对于光学光刻模板、光源和光刻胶特性等的控制和优化。 本书系统地介绍了overlay技术中涉及的原理、方法和技术。书中详细介绍了光刻对位的定义、分类和精度要求,并对光刻机中用于实现对位的抓手装置进行了深入研究。此外,书中还介绍了光刻胶对overlay精度的影响,以及光源对光刻图形质量和对位精度的影响。 作者通过大量的实验和理论分析,深入探讨了overlay技术中的挑战和解决方法。书中提供了对位误差分析和校正的方法,并介绍了一些常见的对位衡量方法和对位改善的技术手段。此外,书中还讨论了一些新兴的overlay技术,如双投影光刻和多重光束干涉光刻。 总之,Levinson所著《Overlay/Principles of Lithography, SPIE, 2005》是一本关于光刻中overlay原理和技术的经典著作。它对于理解和掌握光刻制造技术、提高对位精度以及推动半导体行业的发展具有重要的参考价值。
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