Klarf 文件可视化工具

1.技术框架

1.1 前端:
  • Vue3 网页版
  • Electron + Quasar 可生成 EXEAPK 等客户端
  • Element-Plus 控件
  • axios 跨域
1.2 后端:
  • Flask 提供接口

2. Web 版和客户端版

2.1 Web 版页面

在这里插入图片描述

2.2 客户端界面

在这里插入图片描述

2.3 使用流程
  • SenseTools-Klarf-Parser/data/test_file/ 路径下放入待可视化的 KLA 文件: 例,CPS3TwithoutReview.001.
  • 执行 klarf-parser/FlaskWeb.py ,启动 Flask 后端程序,Flask 调用 Process.py 进行 KLA 文件的解析,将 KLA 文件转换成 Json 格式。
  • Flask 将解析后的 Json 数据发送到 10086 端口。
  • 启动前端程序或者启动 exe 客户端软件,由前端或客户端向本地 10086 端口发送 Get 请求,获取 Json 数据。
  • 前端和客户端程序从获取到的 Json 数据中提取关键信息,在页面绘制缺陷示意图。

3. 后端

3.1 接口设计
  • Server Host: 127.0.0.1

  • Server Port: 10086

@app.route('/parse')
def parse():
    json_data = process()
    return json_data

访问 /parse 路径可以获取 KLA 文件转换的 Json 数据。

Json 数据如下所示:

{'sampling_coord': 
 '[{"x":-2.0,"y":0.0},{"x":-1.0,"y":-4.0},{"x":-1.0,"y":-3.0},{"x":-1.0,"y":-2.0},{"x":-1.0,"y":-1.0},{"x":-1.0,"y":0.0},{"x":-1.0,"y":1.0},{"x":-1.0,"y":2.0},{"x":0.0,"y":-4.0},{"x":0.0,"y":-3.0},{"x":0.0,"y":-2.0},{"x":0.0,"y":-1.0},{"x":0.0,"y":0.0},{"x":0.0,"y":1.0},{"x":0.0,"y":2.0},{"x":1.0,"y":-5.0},{"x":1.0,"y":-4.0},{"x":1.0,"y":-3.0},{"x":1.0,"y":-2.0},{"x":1.0,"y":-1.0},{"x":1.0,"y":0.0},{"x":1.0,"y":1.0},{"x":1.0,"y":2.0},{"x":1.0,"y":3.0},{"x":2.0,"y":-5.0},{"x":2.0,"y":-4.0},{"x":2.0,"y":-3.0},{"x":2.0,"y":-2.0},{"x":2.0,"y":-1.0},{"x":2.0,"y":0.0},{"x":2.0,"y":1.0},{"x":2.0,"y":2.0},{"x":2.0,"y":3.0},{"x":3.0,"y":-5.0},{"x":3.0,"y":-4.0},{"x":3.0,"y":-3.0},{"x":3.0,"y":-2.0},{"x":3.0,"y":-1.0},{"x":3.0,"y":0.0},{"x":3.0,"y":1.0},{"x":3.0,"y":2.0},{"x":3.0,"y":3.0},{"x":4.0,"y":-4.0},{"x":4.0,"y":-3.0},{"x":4.0,"y":-2.0},{"x":4.0,"y":-1.0},{"x":4.0,"y":0.0},{"x":4.0,"y":1.0},{"x":4.0,"y":2.0},{"x":5.0,"y":-4.0},{"x":5.0,"y":-3.0},{"x":5.0,"y":-2.0},{"x":5.0,"y":-1.0},{"x":5.0,"y":0.0},{"x":5.0,"y":1.0},{"x":5.0,"y":2.0},{"x":6.0,"y":0.0}]', 'die_pitch_x': 15299.4, 'die_pitch_y': 14399.7, 'sampling_edge': {"DEFECTID":26.0,"X":80399.5694359711,"Y":-31533.8008700403,"XREL":3902.5694359711,"YREL":11665.2991299597,"XINDEX":5.0,"YINDEX":-3.0,"XSIZE":13.612,"YSIZE":17.015,"DEFECTAREA":196.866953,"DSIZE":13.612,"CLASSNUMBER":49.0,"TEST":1.0,"IMAGECOUNT":26.0,"IMAGELIST":0.0},{"DEFECTID":27.0,"X":80454.0234144374,"Y":-31549.1160538724,"XREL":3957.0234144374,"YREL":11649.9839461276,"XINDEX":5.0,"YINDEX":-3.0,"XSIZE":34.03,"YSIZE":34.03,"DEFECTAREA":590.600859,"DSIZE":24.302,"CLASSNUMBER":49.0,"TEST":1.0,"IMAGECOUNT":27.0,"IMAGELIST":0.0},{"DEFECTID":28.0,"X":80508.4773929036,"Y":-31557.6244893347,"XREL":4011.4773929036,"YREL":11641.4755106653,"XINDEX":5.0,"YINDEX":-3.0,"XSIZE":17.015,"YSIZE":17.015,"DEFECTAREA":185.286544,"DSIZE":13.612,"CLASSNUMBER":49.0,"TEST":1.0,"IMAGECOUNT":28.0,"IMAGELIST":0.0},{"DEFECTID":29.0,"X":88339.8571464383,"Y":35346.7059481177,"XREL":11842.8571464383,"YREL":6547.3059481177,"XINDEX":5.0,"YINDEX":2.0,"XSIZE":10.209,"YSIZE":13.612,"DEFECTAREA":92.643272,"DSIZE":9.625,"CLASSNUMBER":49.0,"TEST":1.0,"IMAGECOUNT":29.0,"IMAGELIST":0.0},{"DEFECTID":30.0,"X":99546.267008286,"Y":11819.4874144129,"XREL":7749.867008286,"YREL":11819.4874144129,"XINDEX":6.0,"YINDEX":0.0,"XSIZE":37.433,"YSIZE":40.836,"DEFECTAREA":1076.978037,"DSIZE":32.817,"CLASSNUMBER":49.0,"TEST":1.0,"IMAGECOUNT":30.0,"IMAGELIST":0.0}]'}
....
3.2 后端函数库
########################################
#  解析 KLARF 文件函数库
########################################
import os
import time
import pandas as pd

def get_parsed_content(file_path):
    """
    :param file_path:
    :return:
    """

def klarf_parser(file_path, file_name):
    """
    :param file_path:
    :param file_name:
    :return:
    """

def klf_timestamp_parser(klf_str):
    """
    :param klf_str:
    :return:
    """

def find_klf_str_keyword_connect_result(klf_str, keyword):
    """
    :param klf_str:
    :param keyword:
    :return:
    """

def klf_tool_parser(klf_str):
    """
    :param klf_str:
    :return:
    """
    
def klf_waferid_and_img(klf_str):
    """
    :param klf_str:
    :return:
    """

def klf_batch_info_parser(klf_str, info_str):
    """
    :param klf_str:
    :param info_str:
    :return:
    """

def klf_sampling_coordinate_parser(klf_str, key_str):
    """
    :param klf_str:
    :param key_str:
    :return:
    """

def klf_defect_coordinate_parser(klf_str, waferID_list):
    """
    :param klf_str:
    :param waferID_list:
    :return:
    """

4. 前端

创建 Quasar 项目:

yarn create quasar

运行 Quasar 项目:

yarn quasar dev

Quasar 安装 axios:

yarn add axios

Quasar 安装 element-plus:

yarn add element-plus --save

src/boot/ 路径下创建 element-plus.js 文件:

// import something here
import { boot } from 'quasar/wrappers'
import ElementUI from 'element-plus'
import 'element-plus/dist/index.css'
export default boot(({ app }) => {
  // Set i18n instance on app

  app.use(ElementUI)
})
export { ElementUI }

src/pages/ 路径下创建 KlaParse.vue

<template>
  <div>
    <h1>Kla Parse Web Page</h1>
    <div>
      <el-button @click="get_data" type="success">解析</el-button>
      <br />
      <el-progress
          :text-inside="true"
          :stroke-width="24"
          :percentage=sta
          status="success"
      />
    </div>
    <br>
    <div>
      <el-button @click="draw" type="primary">画图</el-button>
    </div>
    <div>
      <h3 id="h31">Wafer Id: {{ this.wafer_id }}</h3>
      <h3 id="h32">Kla To Image</h3>
      <canvas id="defectmap" width = "500" height = "500" style="background-color:#fcfafa;"></canvas>
    </div>
  </div>
</template>

<script>
import axios from "axios";
import { ElMessage } from 'element-plus'

export default {
  name: "KlaParse",
  data() {
    return {
      count: 1,
      kla_content: [],
      wafer_id: null,
      sta: 0
    }
  },
  methods: {
    get_data() {
      axios({
        // url: "/api/parse",
        url: "http://127.0.0.1:10086/parse",
        method: 'get',
      }).then(res => {
        ElMessage({
          message: 'Congrats, this is a success message.',
          type: 'success',
        })
        this.sta = 100
        this.kla_content = res.data
      })
    },

    draw() {
      var sampling_coord = JSON.parse(this.kla_content['sampling_coord']);
      var defect_coord = JSON.parse(this.kla_content['defect_coord']);
      var sampling_edge = this.kla_content['sampling_edge'];
      var die_pitch_x = this.kla_content['die_pitch_x'];
      var die_pitch_y = this.kla_content['die_pitch_y'];
      var wafer_id = this.kla_content['waferID'];
      var recipe_id = this.kla_content['Recipe'];
      var lotid = this.kla_content['lotid'];
      var tool_id = this.kla_content['Tool_ID'];
      this.wafer_id = wafer_id
      const canvas = document.getElementById("defectmap");
      var map = canvas.getContext("2d");
      map.translate(0, 0);
      map.lineWidth = 0.05;

      for (var item in sampling_coord){
        var index_defy = parseInt(sampling_edge['def_yl']) + 1  - parseInt(sampling_coord[item]['y']);
        var index_defx = Math.abs(parseInt(sampling_edge['def_xl'])) + 1 + parseInt(sampling_coord[item]['x']);
        var x_pixel = parseFloat(die_pitch_x) / 352.73;
        var y_pixel = parseFloat(die_pitch_y) / 352.73;
        //draw die pitch
        map.strokeRect(index_defx * x_pixel, index_defy * y_pixel, x_pixel, y_pixel);
        map.save();
        for(var item_defect in Object.values(defect_coord)){
          if(defect_coord[item_defect]['XINDEX'] == sampling_coord[item]['x'] && defect_coord[item_defect]['YINDEX'] == sampling_coord[item]['y']){
            map.strokeStyle  = "#FF0000";
            map.lineWidth = 2
            map.strokeRect(index_defx * x_pixel + parseFloat(defect_coord[item_defect]['XREL'])/352.73, index_defy * y_pixel + y_pixel - parseFloat(defect_coord[item_defect]['YREL'])/352.73, 0.03, 0.02);
            map.restore();
          }
        }
      }
      var map_image = new Image();
      map_image.src =  canvas.toDataURL("image/png");
      var map_link = document.createElement("a");
      map_link.src = map_image;
      map_link.href = map_image.src;
      map_link.download = lotid + "-" + tool_id + "-" + recipe_id +"-"+ wafer_id;
      // map_link.click();
      // map.clearRect(0, 0, 500, 500);
      if(canvas.getContext) {
        var ctx = canvas.getContext('2d');
        ctx.drawImage(map_image, 0, 0, 500, 500);
      }
      // this.sta = 0;
    }
  }
}
</script>

<style scoped>
h1 {
  font-size: 40px;
  color: #26A69A;
  margin-left: 20px;
}

#h31 {
  font-size: 20px;
  margin-left: 20px;
}

#h32 {
  font-size: 20px;
  margin-left: 20px;
}

defectmap {
  color: #26A69A;
  margin-left: 20px;
}

.el-progress {
  width: 50%;
  margin-left: 20px;
}

.el-button {
  margin-bottom: 10px;
  margin-left: 20px;
}
</style>
4.1 Quasar 启动 Web Page

WebStorm 软件的 Terminal 中执行:

yarn quasar dev

在浏览器中输入:http://192.168.3.42:8080
在这里插入图片描述

4.2 Quasar 编译生成 .exe 文件

WebStorm 软件的 Terminal 中执行:

quasar build -m electron

quasar-project/dist/electron/klarf_tool-win32-x64/ 中生成 klarf_tool.exe 可执行文件,双击 exe 软件即可启动客户端页面。
在这里插入图片描述

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