SECS/GEM series: Recipe Management

Following several SECS/GEM series blog posts, including Collection EventsData Polling and Alarms, we now get into the features and merit of the GEM feature called Recipe Management. We will cover the definition of recipes, what recipe management means and why you need this feature!

What are recipes?

Recipes are sets of instructions describing how the equipment should process its material.  The Recipe content is defined by the equipment supplier.

What is recipe management?

Recipe management allows the factory host to transfer recipes to and from the equipment.   It also requires the equipment to notify the factory host when recipes are changed on the equipment.

Why do you need this feature?

Almost all semiconductor factories require this feature to ensure recipe integrity and to support traceability.   The host will upload approved recipes from the equipment and save them for later use to ensure that the recipe does not change.   For traceability, the recipe is usually saved with the process data.

How does recipe management work?

Recipes are passed between the host and equipment via SECS messages.   There are several sets of SECS messages to enable this.  E30 GEM specifies formatted, unformatted, and large recipe message sets.  The large recipe message set will not be discussed here. 

The equipment is also required to notify the host whenever recipes are changed by an operator at the equipment.  A PPChange collection event is generated with two data variables PPChangeName containing the PPID of the recipe that changed and PPChangeStatus containing the type of change (created, deleted, edited).

Once a recipe has been transferred to the equipment, the equipment should verify the content.  If the recipe is invalid, then a PPVerificationFailed collection event should be generated with a  PPError data variable containing the validation failure information to notify the host of the problem.  The recipe should not be used if it fails verification.

Identification

Each recipe is identified by an ASCII name called a process program ID or PPID.  The factory host and the equipment GEM interface use the name in recipe operations.

Persistence

Recipes are persisted in a GEM interface. If the host disconnects and reconnects, or if the equipment is restarted, the GEM interface will remember the recipes.   In addition, most factory hosts will save recipes on the factory side.

Which messages are used?

Here is a summary of each of the primary messages related to collection events. Note that the “S” identifies the “stream” and “F” identifies the “function”. Together, a stream and function number uniquely identify a message.

All Recipes

Message ID

Direction

Description

S7F17

Host -> Equipment

Delete a recipe from the equipment.  

An empty list will delete all recipes from the equipment.

S7F19

Host->Equipment

Request a list of available recipes from the equipment

 

Unformatted Recipes

Message ID

Direction

Description

S7F1

Host<-Equipment

Equipment requests to upload a recipe

S7F3

Host<-Equipment

Equipment uploads a recipe to the host

S7F5

Host<-Equipment

Equipment requests a recipe from the host

S7F1

Host->Equipment

Host requests to download a recipe

S7F3

Host->Equipment

Host downloads a recipe to the equipment

S7F5

Host->Equipment

Host requests a recipe from the equipment

 

Formatted Recipes

Message ID

Direction

Description

S7F1

Host<-Equipment

Equipment requests to upload a recipe

S7F23

Host<-Equipment

Equipment uploads a recipe to the host

S7F25

Host<-Equipment

Equipment requests a recipe from the host

S7F1

Host->Equipment

Host requests to download a recipe

S7F23

Host->Equipment

Host downloads a recipe to the equipment

S7F25

Host->Equipment

Host requests a recipe from the equipment

S7F29

Host<-Equipment

Equipment requests to verify a recipe

S7F27

Host<-Equipment

Equipment sends recipe verification results

 

Frequently Asked Questions about Recipe Management

How large a recipe can be transferred?

For unformatted recipe messages, the recipe is either a single ASCII string or a binary array value.  A single array value is limited to 16.777215 MB.

Formatted recipe messages, the recipe is split up into a list of items. A single array value is limited to 16.777215 MB.  Total message size is limited to 4.294967295 GB.

评论
添加红包

请填写红包祝福语或标题

红包个数最小为10个

红包金额最低5元

当前余额3.43前往充值 >
需支付:10.00
成就一亿技术人!
领取后你会自动成为博主和红包主的粉丝 规则
hope_wisdom
发出的红包
实付
使用余额支付
点击重新获取
扫码支付
钱包余额 0

抵扣说明:

1.余额是钱包充值的虚拟货币,按照1:1的比例进行支付金额的抵扣。
2.余额无法直接购买下载,可以购买VIP、付费专栏及课程。

余额充值