matlab结构阵列设计,一种基于MATLAB的CMUT阵列设计与成像仿真方法

第 27 卷 第 4 期 2014 年 4 月 传 感 技 术 学 报 CHINESE JOUＲNAL OF SENSOＲS AND ACTUATOＲS Vol． 27 No． 4 Apr． 2014 项目来源: 国家自然科学基金项目( 61127008) ; 国家 863 计划项目( 2011AA040404) 收稿日期:2014－01－02 修改日期:2014－03－28 A Method of the CMUT Array Design and Imaging Simulation Based on MATLAB* ZHANG Hui1，2，HE Changde1，2，MIAO Jing1，2，LI Yuping1，2，ZHANG Wendong1，2，XUE Chenyang1，2* ( 1． North University of China，National Key Laboratory Of Electronic Measurement Technology，Taiyuan 030051，China; 2． North University of China，Key Laboratory of Instrumentation Science and Dynamic Measurement of Ministry of Education，Taiyuan 030051，China) Abstract: In order to analyze the influence of design parameters on imaging results and improve the reliability of de-sign of the capacitance micromachined ultrasonic transducer( CMUT) linear array，a simulation method is proposed for underwater imaging of the CMUT array． A new structure of CMUT is designed with a diaphragm，thickness of 3 μm，and 1． 16 mm for the side length，and the center frequency is simulated with ANSYS as 464 kHz． The rela-tionship between parameters and the beam directivity is discussed． Based on the spatial impulse response theory，the simulation method which can display the imaging result of designed CMUT array is presented． Finally，the imaging simulation of this method is proceeded on MATLAB，and an optimal result is given by the CMUT linear array with 64 elements and 0． 5λ for the spacing under monopulse excitation． For the CMUT linear array with different el