signature=4d7591fd2c98045fbabacdbddc9f7398,Critical dimension control in photo-sensitized chemically...

1. A method for patterning a substrate, the method comprising:

receiving a substrate having a radiation-sensitive layer deposited on an underlying layer, the radiation-sensitive layer comprising (1) a photosensitizer generation compound that, when exposed to a first light wavelength, generates photosensitizer molecules in the radiation-sensitive layer,(2) a photo acid generator compound that, when exposed to a second light wavelength, generates photo acid, and (3) a photo-active agent that, when exposed to a third light wavelength, modifies a concentration of photosensitizer in the radiation-sensitive layer;

executing a lithographic exposure adjustment process that projects a pattern of radiation of the third light wavelength onto the radiation-sensitive layer using a digital pixel-based projection system having an array of independently addressable projection points, the projected pattern being based on a critical dimension signature that spatially characterizes critical dimension values of structures corresponding to the substrate, the lithographic exposure adjustment process modifying photosensitizer concentration based on the projected pattern;

executing a lithographic exposure process that exposes the radiation-sensitive layer to radiation of the first light wavelength through a patterned mask such that photosensitizer molecules are generated in exposed portions of the radiation-sensitive layer; and

executing an exposure gain amplification process that flood exposes the