HiHuifong,
Please try to turn off your anti-virus software when installing SQL Server.By the way how did you extract the ISO files?You could extract the ISO files to a temporary folder on your hard drive followingthis article.If the issue still exists,it may have possibility that your installation file is corrupted.Please try to re-download the SQL Server viathis linkand re-install again.
In addition,there is asimilar
threadyou could refer to.
Hope it can be helpful
Regards,
Davy
MSDN Community Support
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