在光子芯片之后,中国也取得量子芯片突破,不再需要EUV光刻机,ASML后悔莫及...

近日华为、百度等陆续公布了“超导量子芯片”专利,说明中国芯片在量子芯片技术上再进一步,这对于中国芯片行业来说无疑是重大的技术突破,ASML勒住中国芯片脖子的EUV光刻机将逐渐被淘汰。

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华为是中国技术研发实力最强的科技企业,在芯片技术方面更是有深厚积累,由于美国的限制,台积电等芯片企业无法再为华为代工生产芯片,因此华为研发绕开EUV光刻机的新芯片技术更为迫切,如今它发布超导量子芯片专利,代表着它在新芯片技术方面的重大突破。

除了华为之外,在今年10月百度也公开了一件超导量子芯片专利,合肥本源量子计算公司更是在量子芯片制造、量子芯片工业设计软件方面取得突破并筹建量子芯片生产线,这都显示出中国芯片企业在量子芯片技术上的快速突破。

量子芯片被视为芯片技术的未来,可以大幅提升芯片的计算能力,改变当下的芯片技术路线,其实除了量子芯片之外,中国在光子芯片方面的进展更快。

日前《北京日报》报道指中国筹建全球第一条光子芯片生产线,预计到2023年实现量产,这就意味着中国在光子芯片商用方面走在了世界前面。光子芯片的运行速度将是当前硅基芯片的1000倍,而功耗将只有硅基芯片的千分之一。量子芯片和光子芯片的突破,为中国芯片行业的发展打开广阔的前景。

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对于中国芯片产业来说,目前最大的阻碍无疑就是EUV光刻机,由于众所周知的原因,ASML至今无法对中国只有出货EUV光刻机,而EUV光刻机对于中国芯片产业推进7nm及更先进工艺非常关键。

不过中国显然不愿受困于EUV光刻机,基于现有的芯片技术,中国研发了芯粒技术,可以大幅提升芯片性能,依托于国内已经量产的14nm工艺可以获得7nm的性能,并且中国的芯粒技术已走在世界前列,通富微电研发的5nm芯粒技术已获得AMD的认可,AMD交给通富微电近百亿美元的订单,另外一家东莞的企业更已研发出3nm封测技术,都凸显出中国基于现有芯片技术的突破。

正如上述当前的先进芯片制造工艺还是需要EUV光刻机,中国也在努力寻求自研EUV光刻机,据悉已申请了数十项专利,只不过EUV光刻机需要上十万个零件,本身就是一条很长的产业链,解决EUV光刻机需要较长的时间,为此中国开始大举发展新芯片技术,石墨烯芯片、量子芯片、光子芯片等都是中国正在研发的先进芯片技术。

如今中国在量子芯片、光子芯片方面都取得了突破,那就意味着中国或将实现弯道超车,彻底绕开EUV光刻机,开辟新的芯片技术路线,彻底摆脱ASML的羁绊,如此中国可以彻底掌握芯片自研技术优势。

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中国加快光子芯片的商用,量子芯片也在加快进度,对于ASML来说无疑是巨大的打击,意味着ASML赖以自豪的EUV光刻机将因此被彻底抛弃,恐怕ASML也没想到它研发的EUV光刻机技术竟然如此快就被抛弃吧。

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Extreme ultraviolet lithography (EUVL) is the principal lithography technology-beyond the current 193-nm-based optical lithography-aiming to manufacture computer chips, and recent progress has been made on several fronts: EUV light sources, scanners, optics, contamination control, masks and mask handling, and resists. This book covers the fundamental and latest status of all aspects of EUVL used in the field. Since 2008, when SPIE Press published the first edition of EUVL Lithography, much progress has taken place in the development of EUVL as the choice technology for next-generation lithography. In 2008, EUVL was a prime contender to replace 193-nm-based optical lithography in leading-edge computer chip making, but not everyone was convinced at that point. Switching from 193-nm to 13.5-nm wavelengths was a much bigger jump than the industry had attempted before. It brought several difficult challenges in all areas of lithography-light source, scanner, mask, mask handling, optics, optics metrology, resist, computation, materials, and optics contamination. These challenges have been effectively resolved, and several leading-edge chipmakers have announced dates, starting in 2018, for inserting EUVL into high-volume manufacturing. This comprehensive volume comprises contributions from the world's leading EUVL researchers and provides the critical information needed by practitioners and those wanting an introduction to the field. Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology. This book is intended for people involved in one or more aspects of EUVL, as well as for students, who will find this text equally valuable.

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