MEMS



MEMS parts are a combination of a sensor and an active interface unit (ASIC). To the tester they are
delivered as diced panel, mounted on a foil attached to a frame.
Each panel has a name. This name is
- lasered on the panel as datamatrix pattern in the golden corner and
- printed on a label sticking at the foil.
A production unit (lot) consists of several of these panels all being of the same type. They are
contained in a magazin and accompanied by a lot traveler.
Both types of MEMS parts EPCOS produces respond to air pressure. They are
- the static ones: pressure sensors and
- the dynamic ones: microphones.
This document emphasizes the pressure sensor as they are more difficult to handle. They need
several test cycles.
Microphones are easier, they can be measured with one single test event.
Common to both types are the need for a test adapter (test jig), a test controller with a test program
(later referred to as controller PC) and the test spec.
Common as well is the data background (access to lot data with product type resolution, spec file, test
jig description and others).
The test machines are similar. At microphones the test chamber is isolated against noise, at pressure
sensors it is leak proof.
The pressure sensors need additional infrastructure (change temperature, change pressure) which is
described in another document.
Of course the test jigs are different, too.
The measurement itself is performed by the measurement device which is a PXI system responding to
queries from the test controller PC.
At microphones the test is possible with Rohde&Schwarz UPV audio analyzers as well.

Necessary information
This chapter describes the information necessary to perform a test.
Each magazin delivered to the tester has a lot number which must be unique.
There should exist a source where this lot number can be resolved into a product type to be able to
load the correct recipe (spec file).
Otherwise the product type has to be keyed in manually which can lead to typing errors but is
necessary at engineering runs and at a lab station.
This lot number is read at the controller PC using a bar code reader and afterwards transferred to the
PMA.
After knowing the lot number the PMA tester reads the LDD file to get the first line which is linked to a
set of machine parameters.
Then it scans the magazin panel by panel and measures them.
At each panel a check is performed whether it belongs to this lot. This check is based on the LDD file
which is also used to log some actions there.
Each panel needs a map. This map has to come as BIS file.
At each panel the appropriate map is updated into the PMA. At each single DUT this map is updated in
its memory. At the end of the panel the modified map is stored in the TEST_RESULT folder.
After knowing the lot number the controller PC resolves it into a product type and loads the spec file.
It initializes the hardware and waits for the PMA to provide the first DUT.
At the end of a panel it writes a file containing the test data of this panel. This file is binary, in PAXFile
format. It may be converted to (ASCII) WAF file format as well.
At the end of the panel an additional file (STA file format) is written as well. This file contains
condensed statistical information.
At the end of a lot a label is printed which will be attached to the lot traveler by the operator.
This label contains header information (lot number, machine, product type, test jig, date, time, ...) and
a yield summary.

The test area has a (high availability) server of its own.
Purpose is that everything the test program or the tester needs, is located in one source and the test
area does not depend on many servers.
Thus the MTBF is higher.
The tester as well as the controller PC operate on a certain directory on a share.
Within this directory exists the following structure:
<server path>\CSSP3\LDD this folder contains the LDD files
<server path>\CSSP3\LASER_INPUT this folder contains a file needed to mark a panel
(not subject of this document)
<server path>\CSSP3\TEST_INPUT this folder contains the BIS files at start of measurement
<server path>\CSSP3\TEST_RESULT this folder contains the BIS files after the measurement
<server path>\CSSP3\TAPER_RESULT this folder contains the BIS files after taping
(not subject of this document)
<server path>\CSSP3\PROGS this folder contains a text file needed by the PMA tester
(grouping of panel layouts into machine programs)
<server path>\CSSP3\LOG this folder contains a text file per tester with
logging information (used by PMAInfo)
There are other folders as well, e.g. for spec files and data storage.
In Munich the server is based on LINUX.
This allows easy integration of scripts for various tasks like map handling for retests and others