The important considerations for selecting an electrostatic voltmeter are:
a) the required electrostatic voltage measurement range;
b) the required measurement response time;
c) the required measurement accuracy;
d) the spatial resolution.
1. The electrostatic voltmeter should have a sufficient voltage range that will accommodate the
anticipated levels of voltage potential on surfaces or devices being processed by the AHE. A
selection of too high a measurement range may sacrifice voltage resolution at the low end of
the range due to noise, while selection of too low of a measurement range may cause out[1]of-range-operation (saturation).
2. The required response time of the electrostatic voltmeter must be carefully selected in
applications where (a) surfaces with different voltage levels are rapidly scanned by moving
the electrostatic voltmeter probe across the surfaces, or (b) where charged devices are
moving quickly past the probe. For full measurement accuracy, the electrostatic voltmeter
needs to have a response time (10% to 90%) that is four times faster than the time period
that the surface / device is under the probe.
Example: If the time from the leading edge of the device passing under the probe until the
trailing edge of the device passing under the probe is 12 milliseconds, then the electrostatic
voltmeter should have a response time of 3 milliseconds or faster.
3. The accuracy of an electrostatic voltmeter measurement is dependent on factors such as:
A. The spacing distance between the measured surface and the probe;
In general, if the probe’s sensing electrode aperture is distance D (e.g., 2 mm) away
from the surface / device, the probe will resolve an area on the surface that is
approximately 5D (e.g., 10 mm) in diameter.
B. The presence of electrostatic fields from extraneous charge sources (not related to the
surface/device) to the probe.
Keeping the probe very close to the surface-under-test during a measurement
significantly limits the effects of extraneous electrostatic fields on the accuracy of the
measurement.
C. The size and geometry of the measured surface / device in relation to the size and
geometry of the probe’s sensing electrode aperture.
Reference the equipment manufacturer for more information.