ANNEX B (INFORMATIVE) – SELECTION OF ELECTROSTATIC VOLTMETERS

The important considerations for selecting an electrostatic voltmeter are:

a) the required electrostatic voltage measurement range;

b) the required measurement response time;

c) the required measurement accuracy;

d) the spatial resolution.

1. The electrostatic voltmeter should have a sufficient voltage range that will accommodate the

anticipated levels of voltage potential on surfaces or devices being processed by the AHE. A

selection of too high a measurement range may sacrifice voltage resolution at the low end of

the range due to noise, while selection of too low of a measurement range may cause out[1]of-range-operation (saturation).

2. The required response time of the electrostatic voltmeter must be carefully selected in

applications where (a) surfaces with different voltage levels are rapidly scanned by moving

the electrostatic voltmeter probe across the surfaces, or (b) where charged devices are

moving quickly past the probe. For full measurement accuracy, the electrostatic voltmeter

needs to have a response time (10% to 90%) that is four times faster than the time period

that the surface / device is under the probe.

Example: If the time from the leading edge of the device passing under the probe until the

trailing edge of the device passing under the probe is 12 milliseconds, then the electrostatic

voltmeter should have a response time of 3 milliseconds or faster.

3. The accuracy of an electrostatic voltmeter measurement is dependent on factors such as:

A. The spacing distance between the measured surface and the probe;

In general, if the probe’s sensing electrode aperture is distance D (e.g., 2 mm) away

from the surface / device, the probe will resolve an area on the surface that is

approximately 5D (e.g., 10 mm) in diameter.

B. The presence of electrostatic fields from extraneous charge sources (not related to the

surface/device) to the probe.

Keeping the probe very close to the surface-under-test during a measurement

significantly limits the effects of extraneous electrostatic fields on the accuracy of the

measurement.

C. The size and geometry of the measured surface / device in relation to the size and

geometry of the probe’s sensing electrode aperture.

Reference the equipment manufacturer for more information.