器件仿真控制语言如下:
# (c) Silvaco Inc., 2013
go atlas
TITLE polysilicon TFT simulation
mesh nx=104 ny=55
#
x.m n=1 l=0 r=1
x.m n=104 l=16 r=1
#
#
y.m n=1 l=-0.12 r=1
y.m n=24 l=0 r=1
y.m n=50 l=0.0450 r=1
y.m n=55 l=0.6 r=1.6
#
#
# **************** regions *******************************
# 1=oxide 2=silicon 3-oxide
#
region num=1 y.min=-0.12 y.max=-0.08 nitride
region num=2 y.min=-0.08 y.max=0. oxide
region num=3 y.min=0. y.max=0.0450 silicon
region num=4 y.min=0.0450 y.max=0.6 oxide
#
# **************** electrodes ***********************