Reference: www.secsgem.cn
www.semisecs.com
1 Introduction
. Support SEMI E4 (SECS I), E5 (SECS II), E30 (GEM), E37 (HSMS) communication standards.
. Extended support for SEMI E39, E40, E87, E90, E94, E116, E142
. Support multiple development languages C, C++, C#, Labview, QT.
. Optional PLC and MES software bridge module, no need to develop.
. Using DLL module method, freely add to the equipment software.
. Provide host EAP simulation software, easily and automatically control equipment.
. Support x86, x64 version
1.1 Product overview
We adopt an excellent software framework, flexibly support SECS/GEM, SECS/GEM300, and support high-speed mass message interaction.
1.1.1 High scalability
It can be easily extended to support GEM 300, Wafer Map, Strip Map and other functions, just add GEM300 function directly to the existing SECS/GEM.
SECS/GEM and SECS/GEM300 support agreement
1.2 Communication realization
For traditional implementation, SECS/GEM announces the interface to the factory, as shown in the figure below.
1.2.2 Multi-host implementation
DMS SECS/GEM will provide multi-server or multi-connection functions. One device can publish two or more GEM interfac