FAB 术语缩写

CD: Critical Dimension 关键尺寸

ADI: After Develop Inspection 显影后检测

AEI: After Etch Inspection 蚀刻后检测

BKM: Best Known Method

REM: Remove

FOUP: Front Opening Unified Pod (It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be removed for processing or measurement by tools equipped with appropriate load ports and robotic handling systems.)

STI: Shallow Trench Isolation 浅槽隔离

ED: Exposure Dose 曝光剂量