SIMS(secondary ion mass spectroscopy)二次离子质谱

1.仪器介绍

二次离子质谱（SIMS）是一种用于通过用聚焦的一次离子束溅射样品表面并收集和分析喷射的二次离子来分析固体表面和薄膜的组成的技术。SIMS是最灵敏的表面分析技术，元素检测限为百万分之几到十亿分之一。

Schematic of a typical dynamic SIMS instrument. High energy (usually several keV) ions are supplied by an ion gun (1 or 2) and focused on to the target sample (3), which ionizes and sputters some atoms off the surface (4). These secondary ions are then collected by ion lenses (5) and filtered according to atomic mass (6), then projected onto an electron multiplier (7, top), Faraday cup (7, bottom), or CCD screen (8)

2.工作原理