SECS GEM开发

参考

1. “SEMI E30, GENERIC MODEL FOR COMMUNICATIONS AND CONTROL OF MANUFACTURING EQUIPMENT (GEM)”, Semiconductor Equipment and Materials International.
2. “SEMI E5, SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)”, Semiconductor Equipment and Materials International.
3. “SEMI E4, SEMI EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SECS-I)”, Semiconductor Equipment and Materials International.
4. “SEMI E37, HIGH SPEED MESSAGE SERVICES (HSMS) GENERIC SERVICES”, Semiconductor Equipment and Materials International.

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GEM COMPLIANCE STATEMENT