SECS/GEM300通讯平台设计

SECS/GEM协议标准为半导体工厂自动化提供框架,促进不同供应商设备的自动化连接。GEM标准定义了设备行为和通信能力,支持制造自动化。HSMS作为高速通讯替代方案,提供设备间互操作性。该文详述了SECS、GEM、HSMS协议及其实现目标,强调其在半导体制造业中的重要性和经济效益。
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SECS/GEMM 标准为标准工厂自动化提供了框架,从远程主机监控和控制设备。 它是一种国际 公认和采用的标准,允许来自不同供应商的设备在制造工厂中自动化。 GEM 标准定义了一组基本的 GEM 要求和一组额外的 GEM 功能。 GEM 要求每个 GEM 界面中都包含特定元素。 但是,它鼓励每个接口都具有独特的机器特定元素。
协议和方案网站 www.secsgem.cn

SECSI意义和初衷
Revision History — This is the first major revision since the original release of SECS-I in 1980. Very little of the original intent of SECS-I has been altered, although there are a few significant additions. The changes are summarized in Appendix 1. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.
Intent — This Standard provides a means for independent manufacturers to produce equipment and/or hosts which can be connected without requiring specific knowledge of each other.

SECS协议
The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.
It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the
message transfer protocol requirements are contained in § 6.
It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructe

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