惯性测量单元(IMU)传感器--MEMS微纳制造系列简报

惯性测量单元(IMU)传感器在现代技术中起着关键作用,从军事的JDAM制导炸弹到自动驾驶的定位系统,再到无人机和VR/AR设备。随着MEMS技术的发展,IMU在消费级应用中逐渐普及,特别是在自动驾驶中作为核心定位技术。然而,我国在高精度惯性传感器方面与国际先进水平仍有差距,需加强微纳制造技术工艺的应用与推广,以推动产业化进程。
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随着新一轮科技革命和产业变革的加速演进,5G、人工智能、物联网等基础设施日趋完善,无人驾驶、无人机、VR/AR等终端应用技术商业化规模快速增长,而连接新一代信息技术的基础技术与终端应用的——以MEMS为核心的智能传感器,正处于爆发阶段。MEMS传感器的设计与制造依赖大规模微纳制造技术,基于此,深圳市微纳制造产业促进会开展MEMS微纳制造系列调研,通过对核心器件市场应用的研究,分析其背后微纳制造技术的应用,从而促进微纳制造技术的应用及推广。

本期简报我们从惯性测量单元(IMU)传感器的应用说起。

从JDAM制导炸弹说起

今年五月份爆发的巴以冲突,再一次向世人展示了现代战争的可怕威力。以色列空军战机向加沙地带一幢十四层高的大楼发射两枚导弹,就将整幢大楼完全炸平了,是什么技术让这导弹能如此精确制导?确切说这并不是导弹,而是美国研制的联合直接攻击弹药(Joint Direct Attack Munition,字母简称JDAM)。JDAM制导炸弹采用自主式的卫星定位和惯性导航的复合式制导,其中制导控制部件(GCU)是JDAM制导炸弹的核心部件,包括GPS接收机、惯性测量单元(IMU)、任务计算机和电源模块。而IMU又是核心中的核心。

惯性测量单元(Inertial measurement unit,简称IMU)是测量物体三轴姿态角(或角速率)以及加速度的装置。IMU的核心装置是陀螺仪和加速度计。通常情况下,每套惯性测量装置包含三组陀螺仪和加速度计,分别测量三个自由度的角加速度和线加速度,通过对加速度的积分和初始速度、位置的叠加运算,得到物体在空间位置中的运动方向和速度,结合惯性导航系统内的运动轨迹设定,对航向和速度进行修正以实现导航功能。

▲图:惯性导航系统工作原理图

IMU消费级应用爆发

根据应用场景和精度要求不同,可以将惯性导航所需陀螺仪器件分为战略级、导航级、战术级和商业级(消费级):

1、战略级应用场景集中于航天和航海领域;

2、导航级应用场景多为各类导弹武器;

3、战术级应用场景包括地面兵装武器和飞行器;

4、商业级应用场景为民用。

惯性技术发展之初主要用于国防军工领域,高精度

Course Objectives This course will provide an in-depth analysis of the origin of the extra-ordinary sensitivity, fundamental limits, and operating principles of modern nanobiosensors. The primary focus will be the physics of biomolecule detection in terms of three elementary concepts: response time, sensitivity, and selectivity. And, we will use potentiometric, amperometric, and cantilever-based mass sensors to illustrate the application of these concepts to specific sensor technologies. Students of this course will not learn how to fabricate a sensor, but will be able to decide what sensor to make, appreciate their design principles, interpret measured results, and spot emerging research trends. Who Should Take the Course Engineers, chemists, physicists, technology developers, and product managers who have an interest in the emerging field of nanobiosensing. Prerequisites Freshman/sophomore level preparation in physics, chemistry, biology, and mathematics. Course Outline Unit 1: Introduction to Nanobiosensors/ Settling Time L1.1: What are Nanobiosensors, Anyway? L1.2: Basic Concepts: Biomolecules, Analyte Density, Diffusion Distances L1.3: Basic Concepts: Types of Biosensors, Geometry of Biosensing L2.1: Shape of a Surface L2.2: Classical Sensors I L2.3: Classical Sensors II Unit 2: Setting Time L2.4: Sensors with Complex Geometry L2.5: Beating the Limits – Barcode Sensors L2.6: Beating the Limits – Droplet Evaporation L2.7: Beating the Diffusion Limit – Enhanced Diffusion and Fluid Flow L2.8: First Passage and Narrow Escape Time I L2.9: First Passage and Narrow Escape Time II Unit 3: Sensitivity L3.1: Nanobiosensors Sensitivity and Types of Biosensors L3.2: Potentiometric Sensors: Charge Screening for a Planar Sensor L3.3: Potentiometric Sensors: Charge Screening for Cylindrical Sensors L3.4: Potentiometric Sensors: ISFET as a pH-Meter L3.5: Potentiometric Sensors: Why are Biomolecules Charged? L3.6: How to Beat Screening Unit 4: Selectivity L3.7: Amperometric Sensors – Glucose Sensor I L3.8: Amperometric Sensors: Glucose Sensors II L3.9: Amperometric Sensors: Beating the Diffusion Limit by Nanogap Amperometry L3.10: Cantilever-based Sensors: BasicOperation L3.11: Cantilever-based Sensors: Static Response L3.12: Cantilever-based Sensors: Nonlinear Sensing – Flexure FET Unit 5: Putting the Pieces Together L4.1: Introduction and Molecular Recognition L4.2: Physics of Sequential Adsorption L4.3: When all else fails, tag, filer and amplify L4.4: Noise Tranducers L5.1: Genome Sequencer I L5.2: Genome Sequencer II L5.3: Genome Sequencer III L5.4: Concluding Thoughts
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