WFIDCheck校验讨论

1.1 This specification provides a serial alphanumeric marking of silicon or other semiconductor wafers. The wafer
serial number links the properties of the wafer stored in an appropriate database system to each individual wafer for
purposes of tracking and control during wafer and device manufacture.
1.2 By defining the basic code used for the mark, this specification ensures the consistency of wafer marking
performed by wafer manufacturers. Thus, it allows simplification of the performance requirements of automatic
optical character reading (OCR) equipment, provides for unassisted and immediate human readability without wafer
handling, and facilitates resolution of wafer level process variations.
1.3 The marking code is intended to be valid for a broad range of wafer products (i.e., epi, SOI, processed polished
wafers, etc.).