silvaco代码笔记（4）欧姆接触仿真

go atlas simflags="-p 4"

set label=Ti_

set Lgs=0.5
set Lg=0.5
set Lgd=0.5

set Hgf=0.2

set SFP=0.2
set Lsfp=0.5+$Lgs+$Lg+$SFP

set tbarrier=0.001
set tbuffer=1
set Al_composition=0.85
#set In_composition=0.1

set trans_vd=10
set trans_vgstart=-8
set trans_vgstop=2

#X Direction

网格的x方向上的最大值为100um

mesh width=10

x.mesh location=0 spacing=0.1
x.mesh location=0.5 spacing=0.1

去掉T型结构的计算

#x.mesh location=0.5+$Lgs-$Lgfs spacing=0.1

x.mesh location=0.4+$Lgs spacing=0.02
x.mesh location=0.5+$Lgs spacing=0.01
x.mesh location=0.5+$Lgs+$Lg spacing=0.01
x.mesh location=0.6+$Lgs+$Lg spacing=0.02

x.mesh location=1+$Lgs+$Lg+$Lgd spacing=0.1

#Y Direction

y.mesh l=-$Hgf spacing=0.005
y.mesh l=-0.01 spacing=0.002
y.mesh l=0 spacing=0.001
y.mesh l=0.01 spacing=0.002
y.mesh l=$tbarrier-0.001 spacing=0.001
y.mesh l=$tbarrier spacing=0.001
y.mesh l=$tbarrier+0.001 spacing=0.001
y.mesh l=$tbarrier+0.004 spacing=0.001
y.mesh l=$tbarrier+0.008 spacing=0.005
y.mesh l=$tbarrier+$tbuffer spacing=0.05

定义区域region

region num=1 material=GaN y.min=$tbarrier substrate
#region2 AlGaN barrier
region num=2 material=AlGaN x.comp=$Al_composition y.min=0 y.max=$tbarrier
#InAlGaN的情况
#region num=2 material=InAlGaN x.comp=$Al_composition y.comp=$In_composition y.min=0 y.max=$tbarrier
#定义背景是空气
region num=3 material=SiN y.min=-$Hgf y.max=0

定义电极electrode

elec num=1 name=gate y.min=-$Hgf y.max=0.0 x.min=0.5+$Lgs x.max=0.5+$Lgs+$Lg

定义掺杂barrier doping

doping uniform n.type conc=1e15 y.min=0.0 y.max=$tbarrier
#buffer doping
#doping uniform n.type conc=1e15 y.min=$tbarrier
#Ohmic doping

#doping uniform n.type conc=1e18 y.min=0.0 y.max=0.05 x.min=0.45 x.max=0.5

T型栅区域的掺杂

#doping uniform n.type conc=1e18 y.min=0.0 y.max=0.05 x.min=0.5+$Lgs+$Lg+$Lgd x.max=0.55+$Lgs+$Lg+$Lgd

#buffer Fe-doping
#doping region=1 trap acceptor e.level=1.0 concentration=1e19 degen.fac=1 sign=1e-15 sigp=1e-15

contact name=gate workfunction=4.33

非半导体材料介电常数的定义

material material=SiN permittivity=7.5
#material material=Air permittivity=1.0

material KP.SET2 POL.SET2 print

models k.p print srh
mobility fldmob.n MUN=1600 VSATN=1.3e7 BETAN=1.5
mobility fldmob.p

models TEN.PIEZO CALC.STRAIN TENSOR.SCALE=0 PSP.SCALE=1 PIEZO.SCALE=1

output e.mobility con.band val.band charge polar.charge band.par qss

solve init
method gummel newton itlim=20 maxtrap=6
solve vgate=0.0
save outf=$“label"tb”$tbarrier"_AlCom"$Al_composition"_AlGaN.str
tonyplot3D $“label"tb”$tbarrier"_AlCom"$Al_composition"_AlGaN.str

quit