仿真代码:
go atlas
mesh space.mult=1.0
x.mesh loc=0.00 spac=2
x.mesh loc=10.00 spac=1
x.mesh loc=40.00 spac=1
x.mesh loc=50.00 spac=2
#
y.mesh loc=-0.3 spac=0.02
y.mesh loc=0.00 spac=0.05
y.mesh loc=10.00 spac=0.5
y.mesh loc=60.00 spac=2
region num=1 material=air y.min=-0.3 y.max=0
region num=2 user.material=Ga2O3 y.min=0 y.max=10.00
region num=3 user.material=Ga2O3 y.min=10.00 y.max=60
region num=4 material=Nickel y.min=-0.3 y.max=0 x.min=10.00 x.max=40.00
electr reg=4 name=anode
electr name=cathode bot
#.... N-epi doping
doping region=2 n.type conc=5e16 uniform
#.... N+ doping
doping region=3 n.type conc=1e18 uniform
material material=Ga2O3 user.default=GaN user.group=semiconductor \
affinity=4.0 eg300=4.8 nc300=3.72e18 nv300=3.72e18 permittivity=10.0 \
taun0=1e-9 taup0=2.1e-10 mun=118 mup=50 tcon.const tc.const=0.13 \
NSRHN=3.0e17 NSRHP=3.0e17
models SRH fldmob Auger print
impact selb AN1=2.5e8 AN2=2.5e8 BN1=2.26e7 BN2=2.26e7 AP1=2.23e8 AP2=2.23e8 BP1=2.7e8 BP2=2.7e8
contact name=anode workf=4.8 surf.rec barrier
solve init
method newton trap maxtrap=30
# 反向扫描
log outfile = sbd_Reverse.log
solve vanode=0
solve vstep=-5 vfinal=-1000 name=anode
log off
tonyplot sbd_Reverse.log
save outf=sbd_Reverse.str
tonyplot sbd_Reverse.str
output con.band val.band flowline ex.field
solve init
# 正向扫描
log outf=sbd_Forward.log
solve vanode=0.05 vstep=0.1 vfinal=2 name=anode
log off
tonyplot sbd_Forward.log
save outf=sbd_Forward.str
tonyplot sbd_Forward.str
quit
仿真结果
下图是器件的电场分布图,可以看到明显的电场集中效应
下图是器件的正向扫描曲线:
下图是器件反向扫描曲线,可以看到器件的反向击穿电压大概为327V
上述代码仅供参考,欢迎交流讨论!