1、激光步进对准LSA(Laser step alignment)
2、激光干涉对准LIA(filed image alignment)
3、场成像对准FIA(laser interferometer alignment)
4、自相干叠栅条纹的光刻机对准技术
1、激光步进对准LSA(Laser step alignment)
2、激光干涉对准LIA(filed image alignment)
3、场成像对准FIA(laser interferometer alignment)
4、自相干叠栅条纹的光刻机对准技术