Silvaco仿真学习

基础结构：

平栅-LDMOS:【结构】

go atlas
# define mesh
mesh
x.m l=0.0 spac=0.3
x.m l=1.0 spac=0.018
x.m l=2.0 spac=0.018
x.m l=3.0 spac=0.3
y.m l=-0.02 spac=0.01
y.m l=0.0 spac=0.01
y.m l=0.3 spac=0.06
y.m l=1.0 spac=0.2
# define region
region num=1 y.min=0 silicon
region num=2 y.max=0 oxide
# define electrode
elect num=1 name=gate x.min=1.0 length=1 y.min=-0.02 y.max=-0.02
elect num=2 name=source left length=1 y.min=0.0 y.max=0.0
elect num=3 name=drain  right length=1 y.min=0.0 y.max=0.0
elect num=4 name=substrate substrate
# define doping
doping uniform p.type conc=2e16
doping gauss p.type conc=1e17 char=0.1
doping gauss n.type conc=1e20 x.right=1.0 junc=0.2 ratio=0.6
doping gauss n.type conc=1e20 x