Synopsys Sentaurus TCAD系列教程之--Sde概述

Sde 方便处理rule check相关的问题。同时也能让使用者进一步了解器件结构、掺杂和引线等基本操作。Sde用于搭建结构，重新优化网格，提供.mesh文件供后面Sdevice仿真，主要包含以下几部分：

第一部分：

• Scheme Basics
• Defining Simple Variables and Data Types(定义简单变量和数据类型)

第二部分：

• Create Structure (结构搭建)
• Doping(掺杂)
• Contact Definition(引线定义)
• Mesh Definition(网格定义)
• Save File(保存文件)

Scheme Basics

The scripting language of Sentaurus Structure Editor is based on Scheme, which is a LISP-like programming language that differs significantly from most widely used programming languages. A working knowledge of Scheme is needed to create Sentaurus Structure Editor scripts for parameterized devices.
(Sentaurus Structure Editor的脚本语言基于Scheme,与大多数广泛使用的编程语言有很大不同, Scheme是一种类似lisp的编程语言。为参数化器件创建Sentaurus结构编辑器脚本需要Scheme的工作知识）

• A Scheme command is enclosed in parentheses(Scheme命令包含在括号中):
  (Scheme command)
• All text in a line after a semicolon is treated as a comment(分号后面一行中的所有文本都被视为注释):
  ; This is a comment
  (Scheme command) ; This is also a comment
• A Scheme command can extend over several lines(Scheme命令可以延伸到多行):
  (beginning of Scheme command
  continuation of the same Scheme command
  end of the Scheme command)
• Several Scheme commands can be on a single line（多个Scheme命令可以在一行中）:
  (first Scheme command) (second Scheme command) (…)

Defining Simple Variables and Data Types(定义简单变量和数据类型)

• Integers and floating-point numbers are treated as numbers. Declare and define a numeric variable with（整数和浮点数被视为数字。声明并定义一个数字变量）:
  (define i 3)
  (define pi 3.141593)
• Strings are enclosed in double quotation marks. Declare and define a string with（字符串用双引号括起来。声明并定义一个字符串）:
  (define W “Hello World”)
• Characters are preceded by a single quotation mark. Declare and define a character with(字符前面有一个单引号。声明并定义一个字符)：
  (define CHAR 'a)
• Use the variable name to reference a variable(使用变量名引用变量):
  i
  pi
  W
  CHAR
  Update an existing variable with:
  (define j 1)
  (set! j (+ j 1))
  Use define when a variable is introduced for the first time. Use set! to alter an existing variable(首次引入变量时使用define。使用Set！更改现有变量。).

Create Structure(结构创建)

• （sdegeo:set-default-boolean “ABA”）：设置默认布尔行为，参数布尔值可以是以下任意预定义值(默认行为决定如何处置重叠区域，“ABA”: 减去已有区域中的重叠